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WebMay 17, 2010 · Hydrogen silsesquioxane (HSQ) is used as a high-resolution resist with resolution down below 10 nm half-pitch. This material or materials with related functionalities could have widespread impact in nanolithography and nanoscience applications if the exposure mechanism was understood and instabilities controlled. WebAssignors: HEINEMANN, OTTO, HEIRINGHOFF, BURKHARD, KRUMME, HELMUT, LUCKE, HELMUT, SCHOSSLER, WERNER 1984-08-21 Application granted granted Critical 1984-08-21 Publication of US4466750A publication Critical patent/US4466750A/en 2002-06-11 Anticipated expiration legal-status Critical Status Expired - Fee Related legal-status … b daman toys target
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